Title :
Modelling MEMS structures using Cosserat theory
Author :
Calis, M. ; Lagrouche, O. ; Desmulliez, M.P.Y.
Author_Institution :
Corac Group plc, Uxbridge
Abstract :
Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy domains and components. Moreover, the MEMS market is growing very fast, but surprisingly, there is a paucity of modelling and simulation methodology for precise performance verification of MEMS products in the nonlinear regime. For that reason, an efficient and rapid modelling approach is proposed that meets the linear and nonlinear dynamic behaviour of MEMS systems.
Keywords :
micromechanical devices; Cosserat theory; MEMS structure modeling; complex geometrical structures; nonlinear regime; precise performance verification; rapid modelling approach; Costs; Finite element methods; Haptic interfaces; Libraries; Micromechanical devices; Microstructure; Power engineering and energy; Software tools; Solid modeling; Stress;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location :
Nice
Print_ISBN :
978-2-35500-006-5
DOI :
10.1109/DTIP.2008.4752956
