WLR monitoring methodology for assessing charging damage on oxides thicker than 4nm using antenna structures

In this paper a structured scheme of antenna test measurements and data analysis for production monitoring applications will be presented. It is taking into account that usually in a production environment no test chip but a limited number of scribe line modules are available. Scribe line modules allow for placement into most of the products without wasting productive silicon area. The focus is on systematic data evaluation and the possibility to use this method for a discussion and generation of a JEDEC standard on Plasma Induced Damage (PID)