Title :
Noise-based optimization and noise analysis for resonant MEMS structures
Author :
Sharma, Mrigank ; Kannan, Akila ; Cretu, Edmond
Author_Institution :
Electr. & Comput. Eng., Univ. of British Columbia, Vancouver, BC
Abstract :
This paper presents a detailed noise analysis and noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena at micro scale. The extraction of a behavioral model of the solid gas interaction is obtained by matching the FEA simulations with a parametric expression for the squeeze-film damping, suggested by the analytical modeling.
Keywords :
finite element analysis; micromechanical resonators; noise measurement; optimisation; FEA simulations; noise analysis; noise-based optimization; resonant MEMS structures; squeeze-film damping; Circuit noise; Damping; Frequency; Gyroscopes; Micromechanical devices; Noise generators; Noise shaping; Resonance; Signal to noise ratio; Solid modeling;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location :
Nice
Print_ISBN :
978-2-35500-006-5
DOI :
10.1109/DTIP.2008.4752958
