DocumentCode

2390550

Title

Process Technology - Advanced Process and Integration Technology

fYear

2006

fDate

11-13 Dec. 2006

Firstpage

1

Lastpage

1

Keywords

CMOS technology; FinFETs; Hafnium oxide; Insulation; Lithography; MOSFETs; Paper technology; Tin;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 2006. IEDM '06. International

Conference_Location

San Francisco, CA

Print_ISBN

1-4244-0438-X

Type

conf

DOI

10.1109/IEDM.2006.346951

Filename

4154386