Title :
The design and characterization of high performance soleno air gap on-chip inductor
Author :
Hsieh, M.C. ; Jair, D.K. ; Lin, C.S.
Author_Institution :
Dept. of Electron. Eng., Kun Shan Univ., Yung-Kung
Abstract :
In this study, a high quality on chip solenoid inductor with air gap structure were designed and fabricated. The inductor with laterally laid out solenoid structure can save a lots of chip area and obtains high Q value. The measured maximum quality factor Q of the solenoid inductor is 8.8 at 1.7 GHz. Besides, the study of the mechanical properties of the suspended inductors indicates that they can withstand large shock and vibrations.
Keywords :
CMOS integrated circuits; Q-factor; air gaps; inductors; solenoids; air gap structure; frequency 1.7 GHz; high quality on chip solenoid inductor; mechanical properties; quality factor; shock; vibrations; Bonding; CMOS process; CMOS technology; Inductors; Network-on-a-chip; Q factor; Q measurement; Radio frequency; Solenoids; Wet etching;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location :
Nice
Print_ISBN :
978-2-35500-006-5
DOI :
10.1109/DTIP.2008.4752973
