DocumentCode
2390689
Title
The design and characterization of high performance soleno air gap on-chip inductor
Author
Hsieh, M.C. ; Jair, D.K. ; Lin, C.S.
Author_Institution
Dept. of Electron. Eng., Kun Shan Univ., Yung-Kung
fYear
2008
fDate
9-11 April 2008
Firstpage
154
Lastpage
157
Abstract
In this study, a high quality on chip solenoid inductor with air gap structure were designed and fabricated. The inductor with laterally laid out solenoid structure can save a lots of chip area and obtains high Q value. The measured maximum quality factor Q of the solenoid inductor is 8.8 at 1.7 GHz. Besides, the study of the mechanical properties of the suspended inductors indicates that they can withstand large shock and vibrations.
Keywords
CMOS integrated circuits; Q-factor; air gaps; inductors; solenoids; air gap structure; frequency 1.7 GHz; high quality on chip solenoid inductor; mechanical properties; quality factor; shock; vibrations; Bonding; CMOS process; CMOS technology; Inductors; Network-on-a-chip; Q factor; Q measurement; Radio frequency; Solenoids; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location
Nice
Print_ISBN
978-2-35500-006-5
Type
conf
DOI
10.1109/DTIP.2008.4752973
Filename
4752973
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