High performance vertical-cavity surface-emitting laser diodes with a Au-plated heat spreading layer

Etched-pillar vertical-cavity surface-emitting laser diodes exhibit submilliamp threshold currents down to 400 μA and high output power levels. A Au-plated heat spreading layer reduces the thermal resistance by a factor of two and increases the maximum output power by approximately 60%. A laser with 660 μA threshold current reaches a maximum output power of 3.56 mW. The good heat sinking provides high output power despite relatively large operating voltages over 3 V. Small output power variations over a wide temperature range from 20°C to 90°C are demonstrated. The best temperature insensitivity of laser output power is achieved in a constant voltage operation mode