Title :
Integrated 3D sound intensity sensor with four-wire particle velocity sensors
Author :
Yntema, D.R. ; Van Honschoten, L.W. ; Wiegerink, RJ
Author_Institution :
Transducers Sci. & Technol. group, Univ. of Twente, Enschede
Abstract :
A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded ldquoback chamberpsila at both sides of the chip.
Keywords :
acoustic devices; acoustic intensity measurement; nonelectric sensing devices; back chamber; four-wire particle velocity sensor; integrated 3D sound intensity sensor; Acoustic measurements; Acoustic noise; Acoustic sensors; Particle measurements; Pressure measurement; Sensor phenomena and characterization; Temperature sensors; Thermal sensors; Velocity measurement; Wires;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location :
Nice
Print_ISBN :
978-2-35500-006-5
DOI :
10.1109/DTIP.2008.4752976
