Title :
A piecewise-linear reduced-order model of squeeze-film damping for deforarnable structures including large displacement effects
Author :
Missoffe, A. ; Juillard, J. ; Aubry, D.
Author_Institution :
Dept. SSE, SUPELEC, Gif-sur-Yvette
Abstract :
This paper presents a reduced-order model for the Reynolds equation for deformable structure and large displacements. It is based on the model established in which is piece-wise linearized using two different methods. The advantages and drawbacks of each method are pointed out. The pull-in time of a microswitch is determined and compared to experimental and other simulation data.
Keywords :
damping; deformation; microswitches; piecewise linear techniques; MEMS device; Reynolds equation; displacement effects; microstructure mechanical behaviour; microswitch pull-in time; piecewise-linear reduced-order model; squeeze-film damping; structure deformation; Costs; Couplings; Damping; Differential equations; Frequency; Microswitches; Nonlinear equations; Partial differential equations; Piecewise linear techniques; Reduced order systems;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location :
Nice
Print_ISBN :
978-2-35500-006-5
DOI :
10.1109/DTIP.2008.4752989
