Title :
RF-MEMS beam components: FEM modelling and experimental identification of pull-in in presence of residual stress
Author :
Ballestra, Alberto ; Brusa, Eugenio ; Pasquale, Giorgio De ; Munteanu, Mircea Gh ; Somà, Aurelio
Author_Institution :
Mech. Dept., Politec. di Torino, Turin
Abstract :
In this paper an experimental validation of numerical approaches aimed to predict the coupled behaviour of microbeams for out-of-plane bending tests is performed. This work completes a previous investigation concerning in plane microbeams bending.
Keywords :
beams (structures); bending; cantilevers; finite element analysis; internal stresses; micromechanical devices; FEM modelling; RF-MEMS beam components; axial behaviour; double clamped microbeams; flexural behaviour; geometrical nonlinearity; mechanical coupling; microbeams; microbridges; microfabrication; out-of-plane and microcantilevers; out-of-plane bending tests; pull-in identification; residual stress; reverse analysis; tensile stress; Capacitive sensors; Gold; Mathematical model; Numerical models; Performance evaluation; Radiofrequency microelectromechanical systems; Residual stresses; Tensile stress; Testing; Voltage;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location :
Nice
Print_ISBN :
978-2-35500-006-5
DOI :
10.1109/DTIP.2008.4752990
