Title :
Silicon motherboards for multichannel optical modules
Author :
Ambrosy, A. ; Richter, H. ; Hehmann, J. ; Ferling, D.
Author_Institution :
Alcatel CRC, Stuttgart, Germany
Abstract :
A novel method of a fluxless, high precision and reliable Au/Au thermo compression flip chip bonding process for optoelectronic devices has been developed. The main technologies for the manufacturing of multichannel optical modules are based on the height control within 0.5 μm of electro plated Au bumps on silicon motherboards in the close environment of v-grooves, the flip chip bonding applying low pressure at temperatures below 300°C and reproducible passive fiber array alignment with high coupling efficiencies. A coupling loss of 8.5 dB has been achieved, which is very close to the active alignment result of 8.1 dB. The reliability of flip chip bonded laser and photo diodes has been investigated by ageing and temperature cycling tests, where no shift of the threshold current occurred, the coupling efficiency did not vary and the dark current showed no degradation. The RF performance of the electrical interconnection on the silicon motherboard has been analysed and a transmission experiment at 622 Mbit/s has been done successfully
Keywords :
flip-chip devices; integrated optoelectronics; lead bonding; modules; optical communication equipment; optical fabrication; optical fibre couplers; optical interconnections; 300 C; 622 Mbit/s; 8.5 dB; Au-Au; RF performance; Si; V-grooves; ageing; coupling efficiency; coupling loss; dark current; electrical interconnection; electroplated bumps; fluxless Au/Au thermo compression flip chip bonding; laser diodes; manufacturing; multichannel optical modules; optoelectronic devices; passive fiber array alignment; photo diodes; reliability; silicon motherboards; temperature cycling; threshold current; Bonding processes; Flip chip; Gold; Manufacturing; Optical arrays; Optical control; Optical coupling; Optoelectronic devices; Pressure control; Silicon;
Conference_Titel :
Electronic Components and Technology Conference, 1995. Proceedings., 45th
Conference_Location :
Las Vegas, NV
Print_ISBN :
0-7803-2736-5
DOI :
10.1109/ECTC.1995.515340