Title :
Characterization and modeling of an electro-thermal MEMS atructure
Author :
Szabó, P.G. ; Székely, V.
Author_Institution :
Dept. of Electron Devices, Budapest Univ. of Technol. & Econ. (BME), Budapest
Abstract :
Thermal functional circuits are an interesting and perspectivic group of the MEMS elements. A practical realization is called quadratic transfer characteristic (QTC) element which driving principle is the Seebeck-effect. In this paper we present the analyses of a QTC element from different perspectives. To check the real behaviour of the device, we measured a few, secondary properties of the structure which correspond to special behaviour because these properties can not be easily derived from the main characteristics.
Keywords :
Seebeck effect; micromechanical devices; thermoelectric devices; QTC element; Seebeck effect; electro-thermal MEMS structure modeling; quadratic transfer characteristic; thermal functional circuits; CMOS technology; Capacitance; Circuit testing; Electron devices; Micromechanical devices; Power generation economics; Resistance heating; Resistors; SPICE; Scanning electron microscopy;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location :
Nice
Print_ISBN :
978-2-35500-006-5
DOI :
10.1109/DTIP.2008.4753016
