Title :
Design methodology and manufacture of a microinductor
Author :
Flynn, D. ; Desmulliez, M.P.Y.
Author_Institution :
Electr. & Electron. Eng. Dept., Heriot-Watt Univ., Edinburgh
Abstract :
Potential core materials to supersede ferrite in the 0.5-10 MHz frequency range are investigated. The performance of electrodeposited nickel-iron, cobalt-iron-copper alloys and the commercial alloy Vitrovac 6025 have been assessed through their inclusion within a custom-made solenoid microinductor. Although the present inductor, at 500 KHz, achieves 77% power efficiency for 24.7 W/cm3 power density, an optimized process predicts a power efficiency of 97% for 30.83 W/cm3 power density. The principle issues regarding microinductor design and performance are discussed.
Keywords :
cobalt alloys; copper alloys; ferromagnetic materials; inclusions; inductors; iron alloys; magnetic cores; micromechanical devices; nickel alloys; CoFeCu; NiFe; Vitrovac 6025 alloy; cobalt-iron-copper alloys; design methodology; electrodeposition; frequency 0.5 MHz to 10 MHz; inclusion; microinductor; nickel-iron alloys; power density; Circuits; Design methodology; Fabrication; Frequency; Inductance; Inductors; Magnetic cores; Manufacturing; Skin; Transformers;
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location :
Nice
Print_ISBN :
978-2-35500-006-5
DOI :
10.1109/DTIP.2008.4753019