Title :
Invited talk 2: MEMS-enabled smart autonomous systems
Author_Institution :
IMEC, Leuven, Belgium
Abstract :
A smart environment will be enabled by miniaturized sensor systems. MEMS technology is providing both sensing and actuating solutions and energy scavenging solutions. State-of-the-art and IMEC solutions will be presented.
Conference_Titel :
Design, Test, Integration and Packaging of MEMS/MOEMS, 2008. MEMS/MOEMS 2008. Symposium on
Conference_Location :
Nice, France
Print_ISBN :
978-2-35500-006-5
DOI :
10.1109/DTIP.2008.4753021