Title :
On-Chip Integrated Inductors with Ferrite Thin-films for RF IC
Author :
Yang, Chen ; Ren, Tian-Ling ; Liu, Feng ; Liu, Li-Tian ; Chen, Guang ; Guan, Xiao-Kang ; Wang, Albert
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing
Abstract :
This paper reports fabrication of on-chip RF integrated inductors with spin-coated ferrite thin-films (Ni-Zn-Cu-Fe-O, Y-Bi-Fe-O and Co-Zr-O) and high-frequency characterization using equivalent circuit model. Measurement results show that, compared with air-cored inductor, the inductance (L) of Y-Bi-Fe-O and Co-Zr-O thin-film samples increases by 26-50% and 20-39% in 0.1-9GHz, respectively; while the quality factor (Q) of Co-Zr-O inductor is improved by 25-59%. This work demonstrates that the ferrite thin-films are promising for making high-performance integrated compact inductors for RF IC applications
Keywords :
Q-factor; bismuth compounds; cobalt compounds; copper compounds; dielectric thin films; equivalent circuits; ferrite devices; inductance; inductors; iron compounds; microwave integrated circuits; nickel compounds; yttrium compounds; zinc compounds; zirconium compounds; 0.1 to 9 GHz; Co-Zr-O; Ni-Zn-Cu-Fe-O; RFIC; Y-Bi-Fe-O; air-cored inductor; equivalent circuit model; ferrite thin-films; inductance; on-chip integrated inductors; quality factor; Equivalent circuits; Fabrication; Ferrite films; Inductance measurement; Integrated circuit measurements; Integrated circuit modeling; Q measurement; Radio frequency; Radiofrequency integrated circuits; Thin film inductors;
Conference_Titel :
Electron Devices Meeting, 2006. IEDM '06. International
Conference_Location :
San Francisco, CA
Print_ISBN :
1-4244-0439-8
Electronic_ISBN :
1-4244-0439-8
DOI :
10.1109/IEDM.2006.347003
