DocumentCode
23920
Title
On Improving the Predictability of Cycle Time in an NVM Fab by Correct Segmentation of the Process
Author
Hassoun, Michael
Author_Institution
Ind. Eng. Dept., Ariel Univ., Ariel, Israel
Volume
26
Issue
4
fYear
2013
fDate
Nov. 2013
Firstpage
613
Lastpage
618
Abstract
Based on a simulated fab, we first show that forecasting the steady state cycle time of process segments is possible based on certain segment characteristics. We then show that the cycle time predictability is highly dependent on the choice of the segmentation, with the more efficient segmentation corresponding to the product layers.
Keywords
data mining; industrial plants; production engineering computing; production management; semiconductor device manufacture; NVM fab; correct process segmentation; cycle time predictability improvement; data mining; product layers; production management; semiconductor fabrication plant; semiconductor most; Availability; Computational modeling; Data mining; Fabrication; Production management; Semiconductor device modeling; Simulation; Production management; cycle time; data mining; semiconductors; simulation;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2013.2283262
Filename
6607229
Link To Document