Hysteresis in RF MEMS shunt switch: Simulation and measurements

In this paper we present an intrinsic mechanical characteristic of MEMS switches, the hysteresis in ON-OFF cycle of operation. The hysteresis in voltage arises from the transition between stable and unstable equilibrium solutions of the force-balancing equations, due to different stresses suffered by the bridge of the switch during changing the two states. Hysteresis will be modeled making use of electromechanical-structural coupling simulation softwares through finite elements or boundary conditions methods, in order to calculate full beam deflections and release behavior. Finally, RF MEMS switch was constructed and its hysteresis voltages measured and compared.