DocumentCode
2393749
Title
Excimer laser sputtering deposition of antireflection coatings for solar cells
Author
Makita, Y.
fYear
1994
fDate
28 Aug-2 Sep 1994
Firstpage
321
Lastpage
322
Keywords
Coatings; Fiber lasers; Gratings; Laser ablation; Laser theory; Optical films; Photovoltaic cells; Pulsed laser deposition; Silicon compounds; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 1994 Conference on
Print_ISBN
0-7803-1789-0
Type
conf
DOI
10.1109/CLEOE.1994.636563
Filename
636563
Link To Document