DocumentCode :
2393784
Title :
Selective ablation of the amorphous silicon layer by the second-harmonic wave of the TEA CO2 laser
Author :
Sumiyoshi, Tetsumi ; Ninomiya, Y. ; Shiratori, A. ; Obara, M.
fYear :
1994
fDate :
28 Aug-2 Sep 1994
Firstpage :
322
Lastpage :
323
Keywords :
Amorphous silicon; Crystalline materials; Laser ablation; Laser theory; Optical materials; Optical pulses; Optical surface waves; Photonic crystals; Power harmonic filters; Surface emitting lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Europe, 1994 Conference on
Print_ISBN :
0-7803-1789-0
Type :
conf
DOI :
10.1109/CLEOE.1994.636565
Filename :
636565
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2393784
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