• DocumentCode
    2393784
  • Title

    Selective ablation of the amorphous silicon layer by the second-harmonic wave of the TEA CO2 laser

  • Author

    Sumiyoshi, Tetsumi ; Ninomiya, Y. ; Shiratori, A. ; Obara, M.

  • fYear
    1994
  • fDate
    28 Aug-2 Sep 1994
  • Firstpage
    322
  • Lastpage
    323
  • Keywords
    Amorphous silicon; Crystalline materials; Laser ablation; Laser theory; Optical materials; Optical pulses; Optical surface waves; Photonic crystals; Power harmonic filters; Surface emitting lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Europe, 1994 Conference on
  • Print_ISBN
    0-7803-1789-0
  • Type

    conf

  • DOI
    10.1109/CLEOE.1994.636565
  • Filename
    636565
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2393784