DocumentCode :
2393793
Title :
Laser reactive ablation deposition of thin nitride films
Author :
D´Anna, E. ; Leggieri, G. ; Luches, A. ; Martino, Mariapia ; Perrone, A. ; Majni, G. ; Mengucci, P. ; Luk´yanchuk, B.
fYear :
1994
fDate :
28 Aug-2 Sep 1994
Firstpage :
323
Lastpage :
323
Keywords :
Gas lasers; Laser ablation; Laser modes; Laser theory; Optical pulses; Plasma temperature; Pulsed laser deposition; Scanning electron microscopy; Solid lasers; X-ray lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Europe, 1994 Conference on
Print_ISBN :
0-7803-1789-0
Type :
conf
DOI :
10.1109/CLEOE.1994.636566
Filename :
636566
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2393793
