Automatic surface defects detection on silicon wafers

Author

Miron, N. ; Sporea, Dan G.

fYear

1994

fDate

28 Aug-2 Sep 1994

Firstpage

334

Lastpage

334

Keywords

Inspection; Laser beams; Laser theory; Lenses; Light scattering; Mirrors; Optical scattering; Photomultipliers; Silicon; Surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 1994 Conference on

Print_ISBN

0-7803-1789-0

Type

DOI

10.1109/CLEOE.1994.636585

Filename

636585

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