Title :
Design of a SAW-based sensor combined with a micro-hotplate for biological applications
Author :
Lahijani, Babak Vosoughi ; Ghavifekr, Habib Badri
Author_Institution :
Fac. of Electr. Eng., Sahand Univ. of Technol., Tabriz, Iran
Abstract :
A SAW-based sensor for chemical and biological application is designed in this paper. An Aluminum nitride piezoelectric layer is used over a bulk micromachined silicon substrate, so the design is compatible with CMOS Process. An additional micro-hotplate is integrated on system for thermal adjustment of sensing layer on required temperature and thermal stabilization of whole sensor. The SAW device with a working frequency of 610 MHz is built over a 21μm membrane. The frequency response and sensing property of the sensor are achieved via finite element analysis. The temperature distribution of the micro-hotplate is demonstrated.
Keywords :
CMOS integrated circuits; III-V semiconductors; aluminium compounds; finite element analysis; frequency response; membranes; micromechanical devices; surface acoustic wave sensors; temperature distribution; wide band gap semiconductors; AlN; CMOS process; SAW-based sensor; aluminum nitride piezoelectric layer; biological application; bulk micromachined silicon substrate; chemical application; finite element analysis; frequency 610 MHz; frequency response; microhotplate; sensing property; size 21 mum; temperature distribution; thermal adjustment; thermal stabilization; Biology; Heating; Pulse width modulation; Surface acoustic waves; Thermal analysis; MEMS; SAW sensor; finite element analysis; micro-hotplate; surface acoustic wave;
Conference_Titel :
Biomedical Engineering (ICBME), 2010 17th Iranian Conference of
Conference_Location :
Isfahan
Print_ISBN :
978-1-4244-7483-7
DOI :
10.1109/ICBME.2010.5704972
