Title :
Carbon nanotube technologies for future ULSIs
Author :
Awano, Yuji ; Yokoyama, Naoki
Author_Institution :
Nanotechnol. Res. Center, Fujistu Labs. Ltd., Atsugi, Japan
Abstract :
In this paper, we discuss CNT technologies for future ULSIs, in particular, CNT via interconnects and CNT-FET technologies, including single electron transistors.
Keywords :
ULSI; carbon nanotubes; current density; field effect transistors; integrated circuit interconnections; nanotechnology; single electron transistors; C; FET; ULSI; carbon nanotube; interconnects; single electron transistors; Ballistic transport; Carbon nanotubes; Conducting materials; Current density; Nanotechnology; Ohmic contacts; Temperature; Thermal conductivity; Transconductance; Ultra large scale integration;
Conference_Titel :
VLSI Technology, Systems, and Applications, 2003 International Symposium on
Print_ISBN :
0-7803-7765-6
DOI :
10.1109/VTSA.2003.1252546
