Title :
A 130 nm flash+logic+analog modular technology
Author_Institution :
Intel Corp., Santa Clara, CA, USA
Abstract :
A 130 nm Flash+logic+analog technology has been developed specifically for the wireless communications market where low power and high-density highly integrated solutions are required to deliver new capabilities to the mobile handset business. The integration of non-volatile flash memory and digital logic is cost effectively achieved without compromise to either the flash memory density or the digital logic performance. This technology forms the silicon backbone of Intel´s Personal Internet Client Architecture. A modular platform approach makes process modules available to the designer who can choose the level of integration required for any specific product.
Keywords :
CMOS logic circuits; DRAM chips; MIM devices; capacitors; elemental semiconductors; flash memories; low-power electronics; mobile handsets; resistors; silicon; 130 nm; Intel Personal Internet Client Architecture; Si; digital logic; flash-logic-analog modular technology; high-density highly integrated solutions; integration; low power highly integrated solutions; mobile handset business; modular platform; nonvolatile flash memory density; silicon backbone; wireless communications market; Business communication; Costs; Flash memory; Internet; Logic; Mobile handsets; Nonvolatile memory; Silicon; Spine; Wireless communication;
Conference_Titel :
VLSI Technology, Systems, and Applications, 2003 International Symposium on
Print_ISBN :
0-7803-7765-6
DOI :
10.1109/VTSA.2003.1252552