Title :
Mechanical Strain Measurements Using Semiconductor Piezoresistive Material
Author :
Mohammed, Ahmed A S ; Moussa, Walied A. ; Lou, Edmond
Author_Institution :
Alberta Univ., Edmonton, Alta.
Abstract :
In this article, the design of a MEMS-based strain sensor has been introduced. This design has high sensitivity, low power consumption compared with the commercially available thin-foil strain gauges, and high absolute resolution. All of these are at high signal stability over a wide temperature range. The piezoresistivity theory, the microfabrication process flow and the finite element simulation have been introduced to provide guidelines for the sensor design process
Keywords :
finite element analysis; low-power electronics; microsensors; piezoresistive devices; semiconductor materials; strain gauges; strain sensors; MEMS-based strain sensor design; finite element simulation; low power consumption; mechanical strain measurements; microfabrication process flow; piezoresistivity theory; semiconductor piezoresistive material; thin-foil strain gauges; Capacitive sensors; Energy consumption; Mechanical sensors; Piezoresistance; Semiconductor materials; Signal resolution; Stability; Strain measurement; Temperature distribution; Temperature sensors;
Conference_Titel :
MEMS, NANO and Smart Systems, The 2006 International Conference on
Conference_Location :
Cairo
Print_ISBN :
1-4244-0899-7
DOI :
10.1109/ICMENS.2006.348204
