Analysis and Modeling of RF-MEMS Disk Resonator

This paper presents the analysis and modeling of MEMS disk resonator. The main parameters that describe the operation of the disk are the quality factor, natural frequency and equivalent mass. In this work the frequency relation versus Poisson´s ratio of the material and a general equation for the equivalent mass of disk resonator are obtained for different vibration modes of the disk resonator. The resulting model is formulated such that it can be coded by any suitable language such as systemC, verilog-AMS or VHDL-AMS. The model is verified by ANSYS