DocumentCode
2395159
Title
Behavioral Modeling of RF-MEMS Disk Resonator
Author
El-Shafie, Mousa Khalid ; Sakr, Mostafa M. ; Ragai, Hany Fikry
Author_Institution
Dept. of Electron. & Comm., Ain Shams Univ., Cairo
fYear
2006
fDate
Dec. 2006
Firstpage
23
Lastpage
26
Abstract
This paper presents behavioral modeling of RF-MEMS disk resonator through driving its equivalent circuit model. The model is operating in the first two radial contour modes and the results were verified with ANSYS. A Pierce oscillator utilizing the resonator model is designed to demonstrate the performance of the model on the oscillator. The oscillator performance like frequency and phase noise is presented
Keywords
equivalent circuits; micromechanical resonators; oscillators; ANSYS; Pierce oscillator; RF-MEMS disk resonator; behavioral modeling; equivalent circuit model; phase noise; resonator model; Distributed parameter systems; Drives; Electrodes; Equivalent circuits; Frequency; Micromechanical devices; Oscillators; Phase noise; Radiofrequency microelectromechanical systems; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, The 2006 International Conference on
Conference_Location
Cairo
Print_ISBN
1-4244-0899-7
Type
conf
DOI
10.1109/ICMENS.2006.348209
Filename
4155226
Link To Document