Title :
Behavioral Modeling of RF-MEMS Disk Resonator
Author :
El-Shafie, Mousa Khalid ; Sakr, Mostafa M. ; Ragai, Hany Fikry
Author_Institution :
Dept. of Electron. & Comm., Ain Shams Univ., Cairo
Abstract :
This paper presents behavioral modeling of RF-MEMS disk resonator through driving its equivalent circuit model. The model is operating in the first two radial contour modes and the results were verified with ANSYS. A Pierce oscillator utilizing the resonator model is designed to demonstrate the performance of the model on the oscillator. The oscillator performance like frequency and phase noise is presented
Keywords :
equivalent circuits; micromechanical resonators; oscillators; ANSYS; Pierce oscillator; RF-MEMS disk resonator; behavioral modeling; equivalent circuit model; phase noise; resonator model; Distributed parameter systems; Drives; Electrodes; Equivalent circuits; Frequency; Micromechanical devices; Oscillators; Phase noise; Radiofrequency microelectromechanical systems; Vibrations;
Conference_Titel :
MEMS, NANO and Smart Systems, The 2006 International Conference on
Conference_Location :
Cairo
Print_ISBN :
1-4244-0899-7
DOI :
10.1109/ICMENS.2006.348209
