Title :
Performance Enhancement of Gap Closing Electrostatic MEMS Converters
Author :
Salem, Mona S. ; Salem, Marwa S. ; Zekry, A.A. ; Ragai, H.F.
Author_Institution :
ECE Dept., Ain Shams Univ.
Abstract :
This paper proposes new ideas to enhance the output power of the gap closing electrostatic MEMS converters. This is done by including the effect of the parallel capacitance of the converter in the output power equation. In addition the output power of the converter has increased by increasing the converter thickness
Keywords :
electrostatic devices; micromechanical devices; power convertors; electrostatic MEMS converters; output power equation; parallel capacitance; performance enhancement; Capacitance; Electrostatics; Equations; Fingers; Micromechanical devices; Permittivity; Power generation; Springs; Voltage; Wireless sensor networks;
Conference_Titel :
MEMS, NANO and Smart Systems, The 2006 International Conference on
Conference_Location :
Cairo
Print_ISBN :
1-4244-0899-7
DOI :
10.1109/ICMENS.2006.348214
