The digital micromirror device for projection display

Author

Feather, Gary A. ; Monk, David W.

Author_Institution

Texas Instrum. Inc., Dallas, TX, USA

fYear

1995

fDate

18-20 Jan 1995

Firstpage

43

Lastpage

51

Abstract

The digital micromirror device is the product of a technological development program which began at Texas instruments over 15 years ago. It is a micro-electromechanical system, MEMS, device which includes an array of mirrors fabricated above CMOS static RAM memory elements. Rapid switching of the diagonally hinged mirrors allows incident light to be modulated to form the highest quality video images for projection display systems. Recent developments, discussed here, improve the optical and electronic performance as well as reduce the required number of active elements

Keywords

CMOS memory circuits; SRAM chips; large screen displays; micromechanical devices; mirrors; optical modulation; CMOS static RAM memory elements; Texas instruments; diagonally hinged mirrors; digital micromirror device; high quality video images; light modulation; micro-electromechanical system; mirror array; projection display; rapid switching; CMOS technology; Displays; Instruments; Microelectromechanical systems; Micromechanical devices; Micromirrors; Mirrors; Optical modulation; Random access memory; Read-write memory;

fLanguage

English

Publisher

ieee

Conference_Titel

Wafer Scale Integration, 1995. Proceedings., Seventh Annual IEEE International Conference on

Conference_Location

San Francisco, CA

Print_ISBN

0-7803-2467-6

Type

conf

DOI

10.1109/ICWSI.1995.515437

Filename

515437