DocumentCode
2397625
Title
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.91CH3042-9)
fYear
1991
fDate
21-23 Oct. 1991
Abstract
The following topics are dealt with: raw materials issues; process control and improvement methodologies; and manufacturing technology transfer/maintenance and reliability of equipment and facilities
Keywords
integrated circuit manufacture; maintenance engineering; process control; reliability; semiconductor device manufacture; advanced semiconductor manufacturing; maintenance; manufacturing technology transfer; process control; raw materials; reliability;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1991. ASMC 91 Proceedings. IEEE/SEMI 1991
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-0152-8
Type
conf
DOI
10.1109/ASMC.1991.167367
Filename
167367
Link To Document