Title :
World class manufacturing CIM or sink
Author :
Miller, David J. ; Anastasio, Frank J.
Author_Institution :
IBM, Essex Junction, VT, USA
Abstract :
The authors consider the computer integrated manufacturing (CIM) system developed and implemented in IBM´s semiconductor manufacturing line in its Essex Junction, Vermont, facility. The CIM system architecture and the features designed into the system to support the 16-Mb DRAM technology program are described. Major hardware, software, architecture, and integration components are discussed, including equipment control, automation, automatic processing, logistics management, supervision and control capabilities, database integration, networks, and interfaces
Keywords :
CAD/CAM; DRAM chips; integrated circuit manufacture; manufacturing computer control; manufacturing data processing; CIM; DRAM technology; IBM; automatic processing; automation; computer integrated manufacturing; database integration; equipment control; integration components; logistics management; semiconductor manufacturing line; supervision; system architecture; Automatic control; Computer aided manufacturing; Computer architecture; Computer integrated manufacturing; Hardware; Logistics; Manufacturing automation; Process control; Random access memory; Semiconductor device manufacture;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1991. ASMC 91 Proceedings. IEEE/SEMI 1991
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-0152-8
DOI :
10.1109/ASMC.1991.167378
