A framework for resource management

The authors describe the general framework defined for resource management at RIT (Rochester Institute of Technology) microelectronic manufacturing facilities. The common reliability and maintenance issues and their relationships to other, manufacturing-related functions are briefly discussed. Attention is first given to the hardware and software platforms of the RIT integrated circuit factory and their present use. The manufacturing resources utilized for factory operations, are then outlined, and the overall approach followed in resource management, from data collection to data analysis and operations management is described. Some examples implemented in the test database of the CIM (computer-integrated manufacturing) system are presented. Future plans regarding the extension and enrichment of the approach used for resource management are considered