Title :
Using transformations to analyze defect structure SPC charts: a case study
Author_Institution :
Digital Equipment Corp., Hudson, MA, USA
Abstract :
A method of applying SPC (statistical process control) to binomial data is discussed. A normalizing transformation is applied to the raw data, which then enables the use of standard SPC tools. A case study drawn from semiconductor defect structure analysis is presented, although this technique is applicable to binomial data in general
Keywords :
integrated circuit manufacture; statistical process control; binomial data; case study; defect structure SPC charts; normalizing transformation; semiconductor defect structure analysis; standard SPC tools; statistical process control; Application software; Capacitors; Computer aided software engineering; Conductors; Electronic switching systems; Fabrication; Monitoring; Silicon; Testing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1991. ASMC 91 Proceedings. IEEE/SEMI 1991
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-0152-8
DOI :
10.1109/ASMC.1991.167401
