Title :
Femtosecond laser-assisted microstructuring of silicon for novel detector, sensing and display technologies
Author :
Carey, James E. ; Mazur, Eric
Author_Institution :
Dept. of Eng. & Appl. Phys., Harvard Univ., Cambridge, MA, USA
Abstract :
In this talk we present the unique optical and electronic properties of microstructured silicon photodiode, discuss the formation process of conical microstructures, and review the chemical and structural make-up of the surface that are responsible for the novel optoelectronic microstructures. We also discuss future directions for this technique including structuring of new materials, incorporation of new ambient gases, and better control over the position and density of the microstructures themselves.
Keywords :
elemental semiconductors; high-speed optical techniques; laser materials processing; optoelectronic devices; photodiodes; silicon; Si; conical microstructures; display technology; electronic property; femtosecond laser-assisted microstructuring; microstructured silicon photodiode; optical property; optoelectronic microstructures; sensing technology; Chemical lasers; Chemical processes; Chemical technology; Displays; Microstructure; Optical sensors; Photodiodes; Silicon; Ultrafast electronics; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7888-1
DOI :
10.1109/LEOS.2003.1252883