Title :
Planarized MIM active matrix for LCD addressing
Author :
Smirnov, Alexander ; Usenok, A. ; Vorobjeva, A. ; Vysotsky, V.
Author_Institution :
Dept. of Microelectron., Minsk Radioeng. Inst., Byelorussia
Abstract :
A novel type of planarized MIM active matrix for LCD (liquid crystal display) addressing has been developed. The planarization has been achieved due to formation of self-aligned ´horizontal´ Ta-Ta/sub 2/O/sub 5/-Al diodes, incorporated into a porous Al/sub 2/O/sub 3/ film. High-quality pictures on color LCD with a diagonal of 6 in have been observed.<>
Keywords :
liquid crystal displays; metal-insulator-metal devices; semiconductor diodes; semiconductor technology; tantalum; tantalum compounds; 6 inch; LCD addressing; Ta-Ta/sub 2/O/sub 5/-Al diodes; colour LCD; liquid crystal display; nematic liquid crystals; planarized MIM active matrix; porous Al/sub 2/O/sub 3/ film; self aligned horizontal film; Active matrix addressing; Active matrix organic light emitting diodes; Active matrix technology; Annealing; Capacitance; Counting circuits; Leg; Planarization; Temperature; Thickness control;
Conference_Titel :
Display Research Conference, 1991., Conference Record of the 1991 International
Conference_Location :
San Diego, CA, USA
Print_ISBN :
0-7803-0213-3
DOI :
10.1109/DISPL.1991.167442
