Title :
Pressure sensing using micromachined asymmetric integrated vertical coupler
Author :
Kiyat, Isa ; Kocabas, Coskun ; Aydinli, Atilla
Author_Institution :
Dept. of Phys., Bilkent Univ., Ankara, Turkey
Abstract :
Analysis of a novel pressure sensor based on a SOI asymmetric vertical coupler is presented. The integrated optical component is a coupler composed of a single mode low index waveguide and a thin silicon slab.
Keywords :
elemental semiconductors; integrated optics; micromachining; optical couplers; optical sensors; optical waveguides; pressure sensors; refractive index; silicon; silicon-on-insulator; SOI; SiO2-Si; asymmetric integrated vertical coupler; integrated optical component; micromachining; pressure sensor; single mode low index waveguide; thin silicon slab; Optical interferometry; Optical refraction; Optical ring resonators; Optical sensors; Optical variables control; Optical waveguides; Refractive index; Samarium; Silicon; Slabs;
Conference_Titel :
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7888-1
DOI :
10.1109/LEOS.2003.1252900
