Title :
Materials challenges for TFT on plastic substrates
Author_Institution :
Dept. of Electr. & Comput. Eng., Waterloo Univ., Ont., Canada
Abstract :
In this paper, we present our results on materials optimization and TFT fabrication at 120°C and 75°C, the temperatures compatible with PEN and PET substrates, respectively.
Keywords :
optical fabrication; optical materials; substrates; thin film transistors; 120 C; 75 C; PET; TFT; fabrication; materials optimization; plastic substrates; substrates; Computer displays; Dielectric materials; Dielectric substrates; Fabrication; Flat panel displays; Hydrogen; Plasma temperature; Plastics; Semiconductor films; Thin film transistors;
Conference_Titel :
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7888-1
DOI :
10.1109/LEOS.2003.1252909
