• DocumentCode
    2399283
  • Title

    Materials challenges for TFT on plastic substrates

  • Author

    Sazonov, Andrei

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Waterloo Univ., Ont., Canada
  • Volume
    2
  • fYear
    2003
  • fDate
    27-28 Oct. 2003
  • Firstpage
    533
  • Abstract
    In this paper, we present our results on materials optimization and TFT fabrication at 120°C and 75°C, the temperatures compatible with PEN and PET substrates, respectively.
  • Keywords
    optical fabrication; optical materials; substrates; thin film transistors; 120 C; 75 C; PET; TFT; fabrication; materials optimization; plastic substrates; substrates; Computer displays; Dielectric materials; Dielectric substrates; Fabrication; Flat panel displays; Hydrogen; Plasma temperature; Plastics; Semiconductor films; Thin film transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
  • ISSN
    1092-8081
  • Print_ISBN
    0-7803-7888-1
  • Type

    conf

  • DOI
    10.1109/LEOS.2003.1252909
  • Filename
    1252909