DocumentCode
2399283
Title
Materials challenges for TFT on plastic substrates
Author
Sazonov, Andrei
Author_Institution
Dept. of Electr. & Comput. Eng., Waterloo Univ., Ont., Canada
Volume
2
fYear
2003
fDate
27-28 Oct. 2003
Firstpage
533
Abstract
In this paper, we present our results on materials optimization and TFT fabrication at 120°C and 75°C, the temperatures compatible with PEN and PET substrates, respectively.
Keywords
optical fabrication; optical materials; substrates; thin film transistors; 120 C; 75 C; PET; TFT; fabrication; materials optimization; plastic substrates; substrates; Computer displays; Dielectric materials; Dielectric substrates; Fabrication; Flat panel displays; Hydrogen; Plasma temperature; Plastics; Semiconductor films; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
ISSN
1092-8081
Print_ISBN
0-7803-7888-1
Type
conf
DOI
10.1109/LEOS.2003.1252909
Filename
1252909
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