• DocumentCode
    2399305
  • Title

    Optical tools and techniques for failure analysis of modern integrated circuits

  • Author

    Cole, Edward I., Jr. ; Bruce, Michael R. ; Barton, Daniel L. ; Tangyunyong, Paiboon ; Bruce, Victoria J. ; Hawkins, Charles F. ; Soden, Jerry M. ; Henderson, Christopher L. ; Ring, Rosalinda M. ; Chong, Wan-Loong ; Eppes, David H. ; Wilcox, Jacob ; Benson

  • Author_Institution
    Sandia Nat. Labs., USA
  • Volume
    2
  • fYear
    2003
  • fDate
    27-28 Oct. 2003
  • Firstpage
    537
  • Abstract
    Defect localization in modern ICs can be extremely challenging. To address this complexity several optically based methodologies have been developed over the past decade. These techniques will be described demonstrating their utility in locating defects.
  • Keywords
    failure analysis; integrated circuits; defect localization; failure analysis; modern integrated circuits; optical tools; Failure analysis; Image analysis; Integrated optics; Laser beams; Modems; Optical beams; Optical imaging; Photonic integrated circuits; Physics; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
  • ISSN
    1092-8081
  • Print_ISBN
    0-7803-7888-1
  • Type

    conf

  • DOI
    10.1109/LEOS.2003.1252911
  • Filename
    1252911
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2399305