DocumentCode :
2399305
Title :
Optical tools and techniques for failure analysis of modern integrated circuits
Author :
Cole, Edward I., Jr. ; Bruce, Michael R. ; Barton, Daniel L. ; Tangyunyong, Paiboon ; Bruce, Victoria J. ; Hawkins, Charles F. ; Soden, Jerry M. ; Henderson, Christopher L. ; Ring, Rosalinda M. ; Chong, Wan-Loong ; Eppes, David H. ; Wilcox, Jacob ; Benson
Author_Institution :
Sandia Nat. Labs., USA
Volume :
2
fYear :
2003
fDate :
27-28 Oct. 2003
Firstpage :
537
Abstract :
Defect localization in modern ICs can be extremely challenging. To address this complexity several optically based methodologies have been developed over the past decade. These techniques will be described demonstrating their utility in locating defects.
Keywords :
failure analysis; integrated circuits; defect localization; failure analysis; modern integrated circuits; optical tools; Failure analysis; Image analysis; Integrated optics; Laser beams; Modems; Optical beams; Optical imaging; Photonic integrated circuits; Physics; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
ISSN :
1092-8081
Print_ISBN :
0-7803-7888-1
Type :
conf
DOI :
10.1109/LEOS.2003.1252911
Filename :
1252911
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2399305
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