Title :
Control and compensation of birefringence in SOI waveguides
Author :
Xu, D.-X. ; Cheben, P. ; Dalacu, D. ; Janz, Siegfried ; Picard, M.-J. ; Tarr, N.G. ; Ye, W.N.
Author_Institution :
Inst. for Microstructural Sci., Nat. Res. Council of Canada, Ottawa, Ont., Canada
Abstract :
In this paper, the theoretical and experimental studies of SOI waveguide birefringence as controlled by cladding stress properties were reported. The experimental birefringence was obtained from array waveguide grating (AWG) demultiplexer Δλ measurements. A finite element simulator (FEMLAB), to analyse the stress and the corresponding birefringence in SOI ridge waveguides, was used.
Keywords :
arrayed waveguide gratings; birefringence; demultiplexing equipment; finite element analysis; optical films; optical planar waveguides; optical variables measurement; photoelasticity; ridge waveguides; silicon-on-insulator; stress effects; Δλ measurement; AWG demultiplexer; SOI ridge waveguide birefringence; Si-SiO2; array waveguide grating demultiplexer; cladding stress properties; finite element simulator; silicon-on-insulator waveguide birefringence; Arrayed waveguide gratings; Birefringence; Etching; Geometry; Optical polarization; Optical waveguides; Photoelasticity; Planar waveguides; Refractive index; Stress;
Conference_Titel :
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7888-1
DOI :
10.1109/LEOS.2003.1252938
