مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

2400279

Title :

About

fYear :

2009

fDate :

10-12 May 2009

Abstract :

Provides general conference information and may include a listing of current committee members and society officers.

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Advanced Semiconductor Manufacturing Conference, 2009. ASMC '09. IEEE/SEMI

Conference_Location :

Berlin

ISSN :

1078-8743

Print_ISBN :

978-1-4244-3614-9

Type :

conf

DOI :

10.1109/ASMC.2009.5155940

Filename :

5155940

Link To Document :