About

fYear

2009

fDate

10-12 May 2009

Abstract

Provides general conference information and may include a listing of current committee members and society officers.

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference, 2009. ASMC '09. IEEE/SEMI

Conference_Location

Berlin

ISSN

1078-8743

Print_ISBN

978-1-4244-3614-9

Type

conf

DOI

10.1109/ASMC.2009.5155940

Filename

5155940

Link To Document