DocumentCode
2401049
Title
Towards identification of latent defects: Yield mining using defect characteristic model and clustering
Author
Ooi, M.P.-L. ; Chan, C. ; Lee, S.-L. ; Mohanan, A. Achath ; Goh, L.Y. ; Kuang, Y.C.
Author_Institution
Monash Univ., Petaling Jaya, Malaysia
fYear
2009
fDate
10-12 May 2009
Firstpage
194
Lastpage
199
Abstract
Statistical yield modeling is used to calculate the probability of a die containing a latent defect based on its spatial relationship with other dies in its surrounding neighborhood. Previous research implements a blanket application of predictive yield mining on devices and assumes that a spatial relationship exists between killer defects screened at probe test, and latent defects screened at packaged level burn-in. This research investigates the use of the defect characteristic models as yield models to screen latent defects while taking into account wafers with defect clusters. It goes on to evaluate the pre-selected yield models in economic terms and interprets the results as either a predictive or descriptive yield model to describe and identify latent defects.
Keywords
data mining; flaw detection; integrated circuit manufacture; integrated circuit modelling; statistical analysis; data mining; defect characteristic model; defect clusters; dies; integrated circuit manufacturing; latent defect; statistical yield modeling; yield mining; Data engineering; Data mining; Integrated circuit modeling; Integrated circuit yield; Manufacturing processes; Packaging; Predictive models; Probes; Semiconductor device modeling; Testing; data mining; defect cluster; yield mining; yield model;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference, 2009. ASMC '09. IEEE/SEMI
Conference_Location
Berlin
ISSN
1078-8743
Print_ISBN
978-1-4244-3614-9
Electronic_ISBN
1078-8743
Type
conf
DOI
10.1109/ASMC.2009.5155982
Filename
5155982
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