Title :
Micromolding of high Q toroid resonators
Author :
Martin, Andrew ; Yang, Lei ; Vahala, Kerry
Author_Institution :
Dept. of Appl. Phys., California Inst. of Technol., Pasadena, CA, USA
Abstract :
Using silica ultra-high-Q toroid microcavity masters, replica molding is applied to fabricate polymer microcavity arrays with Q factors in excess of 105.
Keywords :
Q-factor; cavity resonators; micro-optics; microcavities; micromechanical resonators; moulding; optical arrays; optical fabrication; optical polymers; optical resonators; silicon compounds; Q factor; SiO2; micromolding; polymer microcavity array fabrication; replica molding; silica toroid microcavity resonator; Fabrication; Manufacturing; Microcavities; Optical losses; Optical polymers; Optical resonators; Optical scattering; Q factor; Q measurement; Silicon compounds;
Conference_Titel :
Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7888-1
DOI :
10.1109/LEOS.2003.1253156