• DocumentCode
    2403287
  • Title

    Micromolding of high Q toroid resonators

  • Author

    Martin, Andrew ; Yang, Lei ; Vahala, Kerry

  • Author_Institution
    Dept. of Appl. Phys., California Inst. of Technol., Pasadena, CA, USA
  • Volume
    2
  • fYear
    2003
  • fDate
    27-28 Oct. 2003
  • Firstpage
    1022
  • Abstract
    Using silica ultra-high-Q toroid microcavity masters, replica molding is applied to fabricate polymer microcavity arrays with Q factors in excess of 105.
  • Keywords
    Q-factor; cavity resonators; micro-optics; microcavities; micromechanical resonators; moulding; optical arrays; optical fabrication; optical polymers; optical resonators; silicon compounds; Q factor; SiO2; micromolding; polymer microcavity array fabrication; replica molding; silica toroid microcavity resonator; Fabrication; Manufacturing; Microcavities; Optical losses; Optical polymers; Optical resonators; Optical scattering; Q factor; Q measurement; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2003. LEOS 2003. The 16th Annual Meeting of the IEEE
  • ISSN
    1092-8081
  • Print_ISBN
    0-7803-7888-1
  • Type

    conf

  • DOI
    10.1109/LEOS.2003.1253156
  • Filename
    1253156
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2403287