• DocumentCode
    2403742
  • Title

    Embedded optical waveguides in silicon for inter and intra-chip data optical interconnects

  • Author

    Stepanov, Stanislav ; Ruschin, Shlomo

  • Author_Institution
    Dept. of Phys. Electron., Tel Aviv Univ., Tel-Aviv, Israel
  • fYear
    2012
  • fDate
    20-23 May 2012
  • Firstpage
    90
  • Lastpage
    91
  • Abstract
    Embedded optical channel waveguides in silicon were realized. The fabrication includes passivation of the inner walls and core filling by a transparent polymer. The waveguides are proposed as data busses beneath Si-based circuitry.
  • Keywords
    embedded systems; integrated optics; optical interconnections; optical polymers; optical waveguides; passivation; silicon; Si; core filling; data busses; embedded optical channel waveguides; interchip data optical interconnects; intrachip data optical interconnects; passivation; silicon; transparent polymer; Optical device fabrication; Optical fibers; Optical interconnections; Optical transmitters; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Interconnects Conference, 2012 IEEE
  • Conference_Location
    Santa Fe, NM
  • Print_ISBN
    978-1-4577-1620-1
  • Type

    conf

  • DOI
    10.1109/OIC.2012.6224432
  • Filename
    6224432
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2403742