• DocumentCode
    2403834
  • Title

    Defect enhanced silicon-on-insulator microdisk photodetector

  • Author

    Ackert, Jason ; Knights, Andrew ; Fiorentino, Marco ; Beausoleil, Ray ; Jessop, Paul

  • Author_Institution
    Dept. of Eng. Phys., McMaster Univ., Hamilton, ON, Canada
  • fYear
    2012
  • fDate
    20-23 May 2012
  • Firstpage
    76
  • Lastpage
    77
  • Abstract
    We demonstrate a CMOS compatible silicon-on-insulator microdisk resonator photodiode with an enhanced response owing to the introduction of defects via ion implantation.
  • Keywords
    CMOS integrated circuits; ion implantation; micro-optics; micromechanical resonators; photodetectors; silicon-on-insulator; CMOS; Si; ion implantation; microdisk resonator photodiode; silicon-on-insulator; Absorption; Ion implantation; Optical resonators; Optical waveguides; Photodiodes; Silicon on insulator technology; ion implantation; microdisk resonators; photodetectors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Interconnects Conference, 2012 IEEE
  • Conference_Location
    Santa Fe, NM
  • Print_ISBN
    978-1-4577-1620-1
  • Type

    conf

  • DOI
    10.1109/OIC.2012.6224439
  • Filename
    6224439
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2403834