Title :
Amorphous Silicon grating-type layer-to-layer couplers for intra-chip connection
Author :
Kang, Joonhyun ; Nishikawa, Yoshihiro ; Atsumi, Yuki ; Oda, Manabu ; Amemiya, Tomohiro ; Nishiyama, Nobuhiko ; Arai, Shigehisa
Author_Institution :
Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan
Abstract :
Amorphous Silicon (a-Si) grating couplers to couple lights between multilayer a-Si waveguides deposited by PECVD were proposed and demonstrated for the first time. The maximum coupling efficiency of 22% was obtained for the a-Si waveguides with 1 μm distance.
Keywords :
amorphous semiconductors; elemental semiconductors; microprocessor chips; optical couplers; optical interconnections; optical multilayers; optical waveguides; plasma CVD; silicon; PECVD; Si; amorphous silicon; couple lights; distance 1 mum; grating-type layer-to-layer couplers; intra-chip connection; multilayer a-Si waveguides; Couplers; Couplings; Gratings; Optical device fabrication; Optical fibers; Si photonics; amorphous silicon; grating coupler; multilayer;
Conference_Titel :
Optical Interconnects Conference, 2012 IEEE
Conference_Location :
Santa Fe, NM
Print_ISBN :
978-1-4577-1620-1
DOI :
10.1109/OIC.2012.6224451
