National Institute of Standards and Technology programs in electrical measurements for electronic interconnections

The National Institute of Standards and Technology operates a number of research projects to advance measurement science and technology for the microelectronic industries. We report here on one component of the NIST program, the fundamental electrical characterization of electronic interconnections through accurate measurement. We have developed and continue to develop measurement techniques for fully calibrated time-domain network analysis, lossy transmission lines on silicon, coupled transmission lines, fully calibrated multiport network analysis, low dielectric constant thin-film materials, and at-speed test