Title :
An investigation of silicon thin membranes for MOMS
Author :
Müller, Raluca ; Obreja, Paula ; Manea, Elena ; Nastase, Nicoleta
Author_Institution :
Inst. of Microtechnol., Bucharest, Romania
Abstract :
This paper presents experiments of manufacturing of thin membranes (less than 10 μm) which can be part of a pressure sensor with optical detection and the investigation of their surface roughness. Anisotropic etching were performed at different temperature and for different concentrations in KOH and TMAH solutions. A silicon elastomer was investigate as masking material during the etching
Keywords :
elemental semiconductors; etching; membranes; micro-optics; microsensors; optical sensors; pressure sensors; silicon; surface topography; KOH solution; MOMS; Si; TMAH solution; anisotropic etching; manufacture; masking material; micro-opto-mechanical system; optical detection; pressure sensor; silicon elastomer; silicon membrane; surface roughness; Biomembranes; Etching; Geometrical optics; Message-oriented middleware; Optical detectors; Optical sensors; Pulp manufacturing; Rough surfaces; Silicon; Surface roughness;
Conference_Titel :
Semiconductor Conference, 1998. CAS '98 Proceedings. 1998 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-4432-4
DOI :
10.1109/SMICND.1998.733759
