• DocumentCode
    2404419
  • Title

    Monolithic silicon waveguides in bulk silicon

  • Author

    Chang, Chia-Ming ; Solgaard, Olav

  • fYear
    2012
  • fDate
    20-23 May 2012
  • Firstpage
    29
  • Lastpage
    30
  • Abstract
    Low loss silicon waveguides fabricated by etching of standard silicon wafers are demonstrated. The fabrication method does not require SOI substrates and therefore simplifies integration of electronics and photonics.
  • Keywords
    elemental semiconductors; etching; integrated optics; optical fabrication; optical losses; optical waveguides; silicon; Si; bulk silicon; electronics; etching; integrated optics; low loss monolithic silicon waveguides; photonics; standard silicon wafers; Optical losses; Optical waveguides; Oxidation; Photonics; Propagation losses; Silicon; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Interconnects Conference, 2012 IEEE
  • Conference_Location
    Santa Fe, NM
  • Print_ISBN
    978-1-4577-1620-1
  • Type

    conf

  • DOI
    10.1109/OIC.2012.6224463
  • Filename
    6224463
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2404419