Title :
The impurities diffusion in the semiconductors using the finite elements method
Author :
Schiopu, Paul ; Lakato, Eugen ; Degeratu, Vasile ; Stefan, Cornelia ; Ivan, S.
Author_Institution :
Bucharest Politehnica Univ., Romania
Abstract :
The finite elements method is a very efficient research and development tool, with many utilizations and different applications. This paper presents the impurities diffusion in the semiconductors using the finite elements method, starting from the similitude between the equation that describes the heat conduction in solids and the diffusion equations
Keywords :
diffusion; finite element analysis; semiconductors; finite element method; heat conduction; impurity diffusion; semiconductor; Analytical models; Character generation; Finite element methods; Integral equations; Numerical models; Physics; Semiconductor impurities; Solids; Temperature distribution; Thermal conductivity;
Conference_Titel :
Semiconductor Conference, 1998. CAS '98 Proceedings. 1998 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-4432-4
DOI :
10.1109/SMICND.1998.733769
