A nanoparticule-based ferromagnetic dielectric Fe/Co composite for RF integrated inductors

Author

Venturin, Damien ; Desvaux, Céline ; Renaud, Philippe ; Chaudret, Bruno ; Parra, Thierry

Author_Institution

Univ. of Toulouse, Toulouse

fYear

2007

fDate

9-12 Oct. 2007

Firstpage

5

Lastpage

8

Abstract

A new ferromagnetic dielectric material formed from insulated Fe/Co nanoparticles is presented. This material is characterised using an original technique based on a silicon micromachined suspended CPW. Then, a spiral integrated RF inductor is designed which implements this material. Measurements demonstrate an up to 80% increase in the inductance value until 2 GHz, while the quality factor is improved until 1 GHz. These results confirm the high potentialities of this material for RF passive applications. Finally, because its dielectric nature, this material appears compatible with low cost microelectronic process.

Keywords

cobalt alloys; coplanar waveguides; dielectric materials; ferromagnetic materials; inductors; iron alloys; micromachining; nanocomposites; nanoparticles; radiofrequency integrated circuits; silicon; Fe-Co; RF dielectric material characterisation; RF integrated inductors; RF passive applications; Si; ferromagnetic dielectric material; insulated iron-cobalt nanoparticles; low cost microelectronic process; nanoparticule-based ferromagnetic dielectrics; silicon micromachined suspended CPW; spiral integrated RF inductor; Coplanar waveguides; Dielectric materials; Dielectric measurements; Dielectrics and electrical insulation; Inductors; Iron; Nanoparticles; Radio frequency; Silicon; Spirals; Ferromagnetic materials; Permeability measurement; Thin film inductors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2007. European

Conference_Location

Munich

Print_ISBN

978-2-87487-001-9

Type

conf

DOI

10.1109/EUMC.2007.4405111

Filename

4405111