Title :
Membrane supported microwave circuits
Author :
Muller, Alexandru ; Iordanescu, Sergiu
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania
Abstract :
The aim of the paper is to present the results obtained by our group in the very exciting field of micromachines structures dedicated to microwave circuits. The main results are: the manufacturing of dielectric membranes on high resistivity silicon substrates, as well as of thin GaAs membranes, the design, manufacturing and characterization of membrane supported distributed and lumped microwave circuit elements. This novel technology has promising prospects regarding the development of microwave and millimeter wave monolithic integrated circuits
Keywords :
MMIC; membranes; micromachining; GaAs; GaAs membrane; Si; dielectric membrane; distributed element; high resistivity silicon substrate; lumped element; manufacture; membrane supported microwave circuit; micromachining; microwave monolithic integrated circuit; millimeter wave monolithic integrated circuit; Biomembranes; Conductivity; Dielectric substrates; Gallium arsenide; Integrated circuit technology; Manufacturing; Microwave circuits; Microwave technology; Millimeter wave technology; Silicon;
Conference_Titel :
Semiconductor Conference, 1998. CAS '98 Proceedings. 1998 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-4432-4
DOI :
10.1109/SMICND.1998.733774
